RSF開(kāi)放式光柵尺
更新：2013-11-11 16:11:32??????點(diǎn)擊：
- 品牌：???RSF
- 型號(hào)：???MS 2x Series
產(chǎn)品介紹
RSF開(kāi)放式光柵尺
非接觸式測(cè)量系統(tǒng)的暴露高位移速度和精度高,常用于較清潔的環(huán)境。
非接觸式暴露編碼器依靠空氣差距編碼器頭部和規(guī)模是統(tǒng)一的測(cè)量范圍。平的安裝面和平行機(jī)導(dǎo)軌是重要的。
根據(jù)不同的版本的測(cè)量系統(tǒng),兩種不同的測(cè)量尺度是可用的:
玻璃(部分ROBAX玻璃陶瓷)或鋼。
|
System resolution |
Measuring scale, Special |
Overall size | Type/Series |
| 10 μm to 0,1 μm |
integrated mounting control via LED, Glass scale or steel tape scale |
small version | MS 2x Series |
| 5 μm to 0,05 μm | steel tape scale | compact version | MS 30 Series |
| 10 μm to 0,5 μm |
Low Cost and High Quality Integrated mounting control via LED Steel tape scale |
flat version | MS 45 Series |
| 0,1 μm to 0,01 μm |
Interferential Linear Encoder Glass scale |
compact version | MS 82 Series |
| 2 μm to 0,1 μm |
Integrated mounting control via LED Steel tape scale |
very small version | MS 14 Series |
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